Download or read book Thin Films From Free Atoms and Particles written by Kenneth Klabunde and published by Elsevier. This book was released on 2012-12-02 with total page 376 pages. Available in PDF, EPUB and Kindle. Book excerpt: Thin Films from Free Atoms and Particles is an eight-chapter text that describes the primary reaction modes of atoms or coordination-deficient particles. This book presents first an introduction to free atoms and particles, followed by a chapter describing the embryonic growth of films, such as dimers, trimers, and other small telomers formed and detected. The next chapters discuss the understanding of discharge processes for forming free atoms and particles. The remaining chapters deal with the technology, techniques, and materials in thin films. Physicists, engineers, materials scientists, and chemists will find this book of great value.