Synthesis of Aluminum Nitride Thin Films at Lower Temperatures by Metalorganic Chemical Vapor Deposition

Synthesis of Aluminum Nitride Thin Films at Lower Temperatures by Metalorganic Chemical Vapor Deposition
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Total Pages : 368
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ISBN-10 : OCLC:36642983
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Book Synopsis Synthesis of Aluminum Nitride Thin Films at Lower Temperatures by Metalorganic Chemical Vapor Deposition by : John N. Kidder

Download or read book Synthesis of Aluminum Nitride Thin Films at Lower Temperatures by Metalorganic Chemical Vapor Deposition written by John N. Kidder and published by . This book was released on 1996 with total page 368 pages. Available in PDF, EPUB and Kindle. Book excerpt:


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Synthesis of Aluminum Nitride Thin Films at Lower Temperatures by Metalorganic Chemical Vapor Deposition
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Pages: 368
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THE LOW-TEMPERATURE THERMAL CHEMICAL VAPOR DEPOSITION AND CATALYZED CHEMICAL VAPOR DEPOSITION OF ALUMINUM NITRIDE AND SILICON NITRIDE (CHEMICAL VAPOR DEPOSITION).
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deposition scheme holds much promise for low temperature film growth.
Preparation and Properties of Aluminum Nitride Films by Plasma-enhanced Metal-organic Chemical Vapor Deposition
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The Single Crystal Synthesis and Some Properties of Aluminum Nitride
Language: en
Pages: 76
Authors: Cortland O. Dugger
Categories: Aluminum compounds
Type: BOOK - Published: 1975 - Publisher:

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This final report, which covers the period from March 1972 to 30 June 1975, discusses some conditions for the synthesis of aluminum nitride (AIN) single crystal