Simulation of Semiconductor Processes and Devices 2007
Author | : Tibor Grasser |
Publisher | : Springer Science & Business Media |
Total Pages | : 472 |
Release | : 2007-11-18 |
ISBN-10 | : 9783211728611 |
ISBN-13 | : 3211728619 |
Rating | : 4/5 (619 Downloads) |
Download or read book Simulation of Semiconductor Processes and Devices 2007 written by Tibor Grasser and published by Springer Science & Business Media. This book was released on 2007-11-18 with total page 472 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume contains the proceedings of the 12th International Conference on Simulation of Semiconductor Processes and Devices, SISPAD 2007, held September 2007 in Vienna, Austria. It provides a global forum for the presentation and discussion of recent advances and developments in the theoretical description, physical modeling and numerical simulation and analysis of semiconductor fabrication processes, device operation and system performance.