Si(1-y)Cy Epitaxy from Disilane and Trimethylsilane by Ultra High Vacuum Rapid Thermal Chemical Vapor Deposition
Author | : Byung-Il Kwak |
Publisher | : |
Total Pages | : 111 |
Release | : 2011 |
ISBN-10 | : OCLC:745439502 |
ISBN-13 | : |
Rating | : 4/5 ( Downloads) |
Download or read book Si(1-y)Cy Epitaxy from Disilane and Trimethylsilane by Ultra High Vacuum Rapid Thermal Chemical Vapor Deposition written by Byung-Il Kwak and published by . This book was released on 2011 with total page 111 pages. Available in PDF, EPUB and Kindle. Book excerpt: