Microelectronics Technology and Devices - SBMicro 2008
Author | : Jacobus W. Swart |
Publisher | : The Electrochemical Society |
Total Pages | : 679 |
Release | : 2008-08 |
ISBN-10 | : 9781566776462 |
ISBN-13 | : 1566776465 |
Rating | : 4/5 (465 Downloads) |
Download or read book Microelectronics Technology and Devices - SBMicro 2008 written by Jacobus W. Swart and published by The Electrochemical Society. This book was released on 2008-08 with total page 679 pages. Available in PDF, EPUB and Kindle. Book excerpt: The SBMicro symposium is a forum dedicated to fabrication and modeling of microsystems, integrated circuits and devices. The goal of the symposium is to bring together researchers in the areas of processing, materials, characterization, modeling and TCAD of integrated circuits, microsensors, microactuators and MEMS. This issue of ECS Transactions contains the papers presented at the 2008 conference.