Ion Implantation Technology
Author | : Edmund G. Seebauer |
Publisher | : American Institute of Physics |
Total Pages | : 582 |
Release | : 2008-12-11 |
ISBN-10 | : 0735405972 |
ISBN-13 | : 9780735405974 |
Rating | : 4/5 (974 Downloads) |
Download or read book Ion Implantation Technology written by Edmund G. Seebauer and published by American Institute of Physics. This book was released on 2008-12-11 with total page 582 pages. Available in PDF, EPUB and Kindle. Book excerpt: The conference is focused on recent advances and emerging technologies in semiconductor processing before, during and after ion implantation. The content encompasses fundamental physical understanding, common and novel applications as well as equipment issues, maintenance and design. The primary audience is process engineers in the microelectronics industry. Additional contributions come from academia and other industry segments (automotive, aerospace, and medical device manufacturing).