Download or read book Formation of Nanoscale Clusters and Islands in Thin Film Deposition Processes and Their Effects on Surface Roughness and Stress written by Lan Zhou and published by . This book was released on 2011 with total page 350 pages. Available in PDF, EPUB and Kindle. Book excerpt: The observed effects are related to the high vapor density in SD and the high instantaneous deposition rate in PLD. Both processes result in formation of nanoscale structures, either by aggregation in the plasma/gas phase (SD) or by self-assembly on the growth surface (PLD).