Chemical-Mechanical Polishing - Fundamentals and Challenges: Volume 566
Author | : S. V. Babu |
Publisher | : |
Total Pages | : 304 |
Release | : 2000-02-10 |
ISBN-10 | : UCSD:31822028470763 |
ISBN-13 | : |
Rating | : 4/5 ( Downloads) |
Download or read book Chemical-Mechanical Polishing - Fundamentals and Challenges: Volume 566 written by S. V. Babu and published by . This book was released on 2000-02-10 with total page 304 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.