Advances in Chemical-Mechanical Polishing: Volume 816
Author | : Materials Research Society. Meeting |
Publisher | : |
Total Pages | : 318 |
Release | : 2004-09 |
ISBN-10 | : UOM:39015059125883 |
ISBN-13 | : |
Rating | : 4/5 ( Downloads) |
Download or read book Advances in Chemical-Mechanical Polishing: Volume 816 written by Materials Research Society. Meeting and published by . This book was released on 2004-09 with total page 318 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This book, first published in 2004, presents advances in fundamental understanding, development, and applications of chemical-mechanical polishing (CMP).