Selective Epitaxial Growth of Silicon Carbide on Silicon by Low- Temperature Chemical Vapor Deposition
Author | : Ying Gao |
Publisher | : |
Total Pages | : 242 |
Release | : 1997 |
ISBN-10 | : OCLC:39009085 |
ISBN-13 | : |
Rating | : 4/5 ( Downloads) |
Download or read book Selective Epitaxial Growth of Silicon Carbide on Silicon by Low- Temperature Chemical Vapor Deposition written by Ying Gao and published by . This book was released on 1997 with total page 242 pages. Available in PDF, EPUB and Kindle. Book excerpt: