Microsystem Technology and Microrobotics

Microsystem Technology and Microrobotics
Author :
Publisher : Springer Science & Business Media
Total Pages : 420
Release :
ISBN-10 : 9783662034507
ISBN-13 : 3662034506
Rating : 4/5 (506 Downloads)

Book Synopsis Microsystem Technology and Microrobotics by : Sergej Fatikow

Download or read book Microsystem Technology and Microrobotics written by Sergej Fatikow and published by Springer Science & Business Media. This book was released on 2013-04-17 with total page 420 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.


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