Directed Self-assembly of Block Co-polymers for Nano-manufacturing

Directed Self-assembly of Block Co-polymers for Nano-manufacturing
Author :
Publisher : Woodhead Publishing
Total Pages : 0
Release :
ISBN-10 : 0081002505
ISBN-13 : 9780081002506
Rating : 4/5 (506 Downloads)

Book Synopsis Directed Self-assembly of Block Co-polymers for Nano-manufacturing by : Roel Gronheid

Download or read book Directed Self-assembly of Block Co-polymers for Nano-manufacturing written by Roel Gronheid and published by Woodhead Publishing. This book was released on 2015-08-06 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: The directed self-assembly (DSA) method of patterning for microelectronics uses polymer phase-separation to generate features of less than 20nm, with the positions of self-assembling materials externally guided into the desired pattern. Directed self-assembly of Block Co-polymers for Nano-manufacturing reviews the design, production, applications and future developments needed to facilitate the widescale adoption of this promising technology. Beginning with a solid overview of the physics and chemistry of block copolymer (BCP) materials, Part 1 covers the synthesis of new materials and new processing methods for DSA. Part 2 then goes on to outline the key modelling and characterization principles of DSA, reviewing templates and patterning using topographical and chemically modified surfaces, line edge roughness and dimensional control, x-ray scattering for characterization, and nanoscale driven assembly. Finally, Part 3 discusses application areas and related issues for DSA in nano-manufacturing, including for basic logic circuit design, the inverse DSA problem, design decomposition and the modelling and analysis of large scale, template self-assembly manufacturing techniques.


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