Design, Characterization and Modeling of Charge Trapping Nonvolatile Semiconductor Memory Devices
Author | : Nathan Eichenlaub |
Publisher | : ProQuest |
Total Pages | : 79 |
Release | : 2009 |
ISBN-10 | : 1109121903 |
ISBN-13 | : 9781109121902 |
Rating | : 4/5 (902 Downloads) |
Download or read book Design, Characterization and Modeling of Charge Trapping Nonvolatile Semiconductor Memory Devices written by Nathan Eichenlaub and published by ProQuest. This book was released on 2009 with total page 79 pages. Available in PDF, EPUB and Kindle. Book excerpt: Methods for optimizing the gate stack of charge trapping NVSM devices are also examined in this thesis. The performance of silicon-rich and stoichiometric nitride layers are compared, as well as multi-layer nitrides composed of a mixture of the two types. Stoichiometric silicon nitride (Si3N 4) is shown to improve retention in MANOS devices without sacrificing programming speed.