Micro Electro Mechanical System Design
Author | : James J. Allen |
Publisher | : CRC Press |
Total Pages | : 492 |
Release | : 2005-07-08 |
ISBN-10 | : 9781420027754 |
ISBN-13 | : 1420027751 |
Rating | : 4/5 (751 Downloads) |
Download or read book Micro Electro Mechanical System Design written by James J. Allen and published by CRC Press. This book was released on 2005-07-08 with total page 492 pages. Available in PDF, EPUB and Kindle. Book excerpt: It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resource. It is a comprehensive, single-source guide that explains the design process by illustrating the full range of issues involved,