Growth Of Single Crystalline Silicon Carbide On Aluminum Nitride By Chemical Vapor Deposition

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Language: en
Pages: 154

Growth of Single Crystalline Silicon Carbide on Aluminum Nitride by Chemical Vapor Deposition

Authors: Payam Shoghi

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Type: BOOK - Published: 2008 - Publisher:

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Crystalline layers of SiC were grown on A1N substrate using chemical vapor deposition (CVD) from a single gas source; Trimethylsilane as well as a combination o

Language: en
Pages: 140

Growth of Solid Solutions of Aluminum Nitride and Silicon Carbide by Metal Organic Chemical Vapor Deposition

Authors: Ingrid Gwyn Jenkins

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Type: BOOK - Published: 1992 - Publisher:

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Language: en
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Growth of Single Crystal Silicon Carbide by Halide Chemical Vapor Deposition

Authors: Mark A. Fanton

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Type: BOOK - Published: 2007 - Publisher:

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Language: en
Pages: 302

Epitaxial Growth of Layered Structures of Silicon Carbide and Aluminum Nitride by Metal-organic Chemical Vapor Deposition

Authors: Bei-Shen Sywe

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Type: BOOK - Published: 1993 - Publisher:

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Language: en
Pages: 10

CVD of SiC and AlN Thin Films Using Designed Organometallic Precursors

Authors: Leonard V. Interrante

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Type: BOOK - Published: 1988 - Publisher:

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High purity, crystalline AlN and SiC thin films have been prepared by the chemical vapor deposition of (CH3)2AlN2)3 and (CH3)HSiCH2)3, respectively, at temperat