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Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set
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Pages: 1983
Authors: Marc J. Madou
Categories: Technology & Engineering
Type: BOOK - Published: 2018-12-14 - Publisher: CRC Press

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Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised
Fundamental Principles of Optical Lithography
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Pages: 503
Authors: Chris Mack
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Type: BOOK - Published: 2011-08-10 - Publisher: John Wiley & Sons

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The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these p
Introduction to Microfabrication
Language: en
Pages: 424
Authors: Sami Franssila
Categories: Technology & Engineering
Type: BOOK - Published: 2005-01-28 - Publisher: John Wiley & Sons

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Microfabrication is the key technology behind integrated circuits,microsensors, photonic crystals, ink jet printers, solar cells andflat panel displays. Microsy
Manufacturing Techniques for Microfabrication and Nanotechnology
Language: en
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Authors: Marc J. Madou
Categories: Technology & Engineering
Type: BOOK - Published: 2011-06-13 - Publisher: CRC Press

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Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews differe
Transport in Laser Microfabrication
Language: en
Pages: 413
Authors: Costas P. Grigoropoulos
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Type: BOOK - Published: 2009-07-30 - Publisher: Cambridge University Press

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Provides researchers and practitioners with the technical background to understand transport phenomena in laser microfabrication applications.