Copper Interconnects, New Contact Metallurgies/structures, and Low-k Interlevel Dielectrics
Author | : G. S. Mathad |
Publisher | : The Electrochemical Society |
Total Pages | : 262 |
Release | : 2001 |
ISBN-10 | : 156677294X |
ISBN-13 | : 9781566772945 |
Rating | : 4/5 (945 Downloads) |
Download or read book Copper Interconnects, New Contact Metallurgies/structures, and Low-k Interlevel Dielectrics written by G. S. Mathad and published by The Electrochemical Society. This book was released on 2001 with total page 262 pages. Available in PDF, EPUB and Kindle. Book excerpt: